JIPELEC™ RTP/RTA Furnaces
Available from ECM-USA, Inc.
Under the brand name JIPELEC, we provide high-quality RTP/RTA (rapid thermal processing and annealing) systems:
The entry-level software-controlled desktop-type rapid thermal annealing (RTA) system is a compact and robust high speed heat treatment system suitable for a wide range of material substrates and structures (steel, glass, c-Si solar...) with a max. size of 2-inch dia. (50-mm).
The workhorse solution for a wide range of RTP/RTA applications with premium features and capabilities. JETFIRST systems are compact and robust halogen lamp heated systems specifically designed to meet the requirements of research and small-scale production units with substrate size ranging from pieces of sample to 300-mm diameter.
The Jipelec software-controlled standalone-type rapid thermal annealing (RTA) system dedicated to research-to-production applications. It has been specially developed to meet the requirements of R&D units involved in the development and qualification of industrial processes and managing their implementation in production.
Applications (varies per model):
• Rapid Thermal Annealing (RTA) and Contact alloying
• Rapid Thermal Oxidation (RTO), deoxidation, and nitridation (RTN)
• Rapid Thermal Diffusion (RTD) – ie. Spin-on Dopant
• Sulfurization, selenization and crystallization
• Structural and mechanical stress relaxation
• Printed metal contact firing
• RTCVD processes (Poly-Silicon, Silicon Nitride, SiO2, etc.)